PH₃
Industrial & Specialty Gases
Phosphine Gas
Phosphine is a critical dopant precursor gas for n-type semiconductor doping, used in silicon, gallium arsenide, and other semiconductor fabrication.
Atomic #
0
Atomic Wt
34.04
CAS #
7803-51-2
Purity
99+%
Available Forms
Compressed gas in specialty cylinders
Purity Grades
99.999%
99.9999%
Applications
Semiconductor
- ✓N-type doping
- ✓CVD
- ✓Epitaxy
Technical Specifications
| Boiling Point | -87.7°C |
| Density (gas @ STP) | 1.52 kg/m³ |
| Reactivity | Spontaneously ignites in air |
| Toxicity | Highly toxic |
| Purity | Ultra-high purity grades available |
Storage Requirements
Store under inert atmosphere. Special handling required.
Packaging Options
- •Ultra-pure specialty cylinders
- •Custom containers
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