SiH₄
Industrial & Specialty Gases
Silane Gas
Silane is essential for silicon thin film deposition, CVD processes, and semiconductor device fabrication. Ultra-pure grades required.
Atomic #
0
Atomic Wt
32.12
CAS #
7803-62-5
Purity
99+%
Available Forms
Compressed gas in specialty cylinders
Diluted in hydrogen
Purity Grades
99.9999%
99.99999%
Applications
Semiconductor
- ✓Silicon epitaxy
- ✓SiO2 deposition
- ✓Si₃N₄ growth
Technical Specifications
| Boiling Point | -112°C |
| Density (gas @ STP) | 1.44 kg/m³ |
| Pyrophoricity | Spontaneously ignites in air |
| Purity | Extremely high purity critical |
| Doping | Can be doped with B, P, As |
Storage Requirements
Store under inert atmosphere. Fireproof storage. Specialist handling.
Packaging Options
- •Ultra-pure specialty cylinders
- •Diluted mixtures
- •Custom containers
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